The UV-fs-Laser technology can be applied to the treatment of solid surfaces with sub-micron precision. Further fields of application are non-linear optics and high energy physics.

In contrast to typical high-power lasers operating in the infrared, our system produces ultraviolet laser pulses. In the UV spectral range, the photon energy is high enough to break molecular bonds in many materials. A further advantage of short wavelength radiation is the high degree of focusability compared to infrared light.

Conventional pulsed lasers are already used for micro-structuring. A fundamental advantage of femtosecond laser systems is that due to the rapid interaction of the laser pulse with the material virtually no heat transfer to the bulk material occurs. Therefore, with ultrashort laser pulses the precision of micro-structures can be substantially improved. Besides a dramatic reduction of the heat affected zone short pulse lasers offer additional advantages and possible applications. Ultrashort pulses generate extremely highly peaked powers carrying only moderate energies. At such high power levels multiphoton absorption becomes dominant and establishes the condition for the concentration of the irradiated energy in a thin surface layer necessary for precise machining even for transparent materials such as quartz, diamond or sapphire.

Since our system combines the advantage of ultrashort pulses with a short wavelength it facilitates the production of surface structures smaller than 0.5 µm on all materials including metals and semiconductors.
Specifications:

Wavelength	248nm
Pulse length	100fs-1ps
Energy	up to 100mJ
Average Power	up to 10W